AFSEM - correlative AFM and SEM

from GETec

The AFSEM system enables you to combine the possibilities of your SEM with the capabilities of an atomic force microscopy (AFM). The AFSEM is compatible with most SEM and FIB/SEM systems on the market and can easily added to your system. Due to the unique design of the AFSEM™ system it will not interfere with other methods of your system (e.g. FIB, FEBID, EDX) but will add information regarding the structure of your sample.

Features
AFSEM™ scanner dimensions 41 x 110 x 77 mm³ (HxLxW)
Weight scanner 500 g
Scan range 35 x 35 µm² closed loop for xy; 5 µm for z
HV compatibility 1 x 10-6 mbar
Scan mode AC & contact mode

The AFSEM will come with ac-mode as well as contact mode as standard and you can also use it for phase contrast or force spectroscopy measurements. You even can add new functionalities by using special cantilevers e.g. conductive measurements.
The AFSEM is easy of use and offers maximum flexibility. The independent 3-axis travel stage will move the cantilever into your SEM field of view and you will sue the SEM sample stage to position your sample to measure your region of interest.

In situ AFM analysis in your SEM

The complementary possibilities of your SEM and the AFSEM enable you to measure your sample with very high lateral resolution, generate 3D-profiles and obtain accurate height information. The large field of view of your SEM system will be used to place the cantilever at exact that position that you selected.

Correlative SEM-AFM analysis

The main goal with correlative microscopy is to make sure that you measure the exact same region of interest with all techniques. This can be very tricky if your systems work independently and one must move the sample between the different systems.  The AFSEM overcomes this difficulty very elegant as it is implemented into your SEM system. Your sample is measured under the same conditions with both methods and you can easily switch between SEM and AFM measurements.

Contacts

Request further information
Product Manager - Electron microscopy & nanotechnology
+49 6151 8806-12
Fax: +49 6151 8806912

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